Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6457929 | Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment | Michito Sato, Hiroaki Fukabori | 2002-10-01 |
| 6354794 | Method for automatically transferring wafers between wafer holders in a liquid environment | Michito Sato, Hiroaki Fukabori | 2002-03-12 |