Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482749 | Method for etching a wafer edge using a potassium-based chemical oxidizer in the presence of hydrofluoric acid | Mitchell Stephen Billington, Yao Huei Huang | 2002-11-19 |