Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488768 | Method and apparatus for treating discharge gas from a Czochralski crystal growing chamber utilizing water spray | — | 2002-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488768 | Method and apparatus for treating discharge gas from a Czochralski crystal growing chamber utilizing water spray | — | 2002-12-03 |