Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471771 | In-situ post epitaxial treatment process | — | 2002-10-29 |
| 6454852 | High efficiency silicon wafer optimized for advanced semiconductor devices | Sean G. Hanna, Zbigniew J. Radzimski | 2002-09-24 |
| 6395085 | Purity silicon wafer for use in advanced semiconductor devices | Sean G. Hanna, Zbigniew J. Radzimski | 2002-05-28 |
| 6375749 | Susceptorless semiconductor wafer support and reactor system for epitaxial layer growth | Mark R. Boydston, Dominic A. Hartmann | 2002-04-23 |
| 6338756 | In-situ post epitaxial treatment process | — | 2002-01-15 |