Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387778 | Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag | Wayne A. Bonin, Zine-Eddine Boutaghou, Roger L. Hipwell, Jr., Lee Walter, Barbara J. Ihlow-Mahrer | 2002-05-14 |
| 6362939 | Balanced microactuator suspension | Peter Crane, Wayne A. Bonin, Barbara J. Ihlow-Mahrer | 2002-03-26 |