Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6349669 | Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junction | Akira Izumi, Atsushi Masuda, Yasunobu Nashimoto, Yosuke Miyoshi, Shuji Nomura +2 more | 2002-02-26 |