Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501189 | ALIGNMENT MARK OF SEMICONDUCTOR WAFER FOR USE IN ALIGNING THE WAFER WITH EXPOSURE EQUIPMENT, ALIGNMENT SYSTEM FOR PRODUCING ALIGNMENT SIGNALS FROM THE ALIGNMENT MARK, AND METHOD OF DETERMINING THE ALIGNED STATE OF A WAFER FROM THE ALIGNMENT MARK | Young-Chang Kim, Heung-jo Ryuk | 2002-12-31 |