Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368405 | Apparatus for growing single crystal silicon and method for forming single crystal silicon layer using the same | — | 2002-04-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368405 | Apparatus for growing single crystal silicon and method for forming single crystal silicon layer using the same | — | 2002-04-09 |