Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472290 | Isolation in micromachined single crystal silicon using deep trench insulation | Dong-il Cho, Sangwoo Lee, Sangchul Lee | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472290 | Isolation in micromachined single crystal silicon using deep trench insulation | Dong-il Cho, Sangwoo Lee, Sangchul Lee | 2002-10-29 |