Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498102 | Method for planarizing a semiconductor device using ceria-based slurry | Jung-yup Kim, Young-rae Park | 2002-12-24 |
| 6335287 | Method of forming trench isolation regions | Hong-kyu Hwang, Bo-Un Yoon, Kyu-hwan Chang | 2002-01-01 |