Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458023 | Multi characterized chemical mechanical polishing pad and method for fabricating the same | — | 2002-10-01 |
| 6334810 | Chemical mechanical polishing apparatus and method of using the same | Ju-Hun Song | 2002-01-01 |