Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458618 | Robust substrate-based micromachining techniques and their application to micromachined sensors and actuators | Mark Allen, Sung-Pil Chang | 2002-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458618 | Robust substrate-based micromachining techniques and their application to micromachined sensors and actuators | Mark Allen, Sung-Pil Chang | 2002-10-01 |