Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451694 | Control of abnormal growth in dichloro silane (DCS) based CVD polycide WSix films | Jin-Ho Jeon, Jong-Seung Yi, Chul Hwan Choi | 2002-09-17 |
| 6376303 | Method of manufacturing a capacitor having oxide layers with different impurities and method of fabricating a semiconductor device comprising the same | Tae-Wook Seo | 2002-04-23 |