Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403431 | Method of forming in an insulating layer a trench that exceeds the photolithographic resolution limits | Tae-Young Chung | 2002-06-11 |
| 6391736 | Method for fabricating a capacitor of a semiconductor device and a capacitor made thereby | Sang-Ho Song, Ki-Nam Kim | 2002-05-21 |