Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6467348 | Microgyroscope with two resonant plates | Seog-soon Baek, Hyun Cheol KIM, Byeoung-ju Ha, Yong-soo Oh | 2002-10-22 |
| 6391673 | Method of fabricating micro electro mechanical system structure which can be vacuum-packed at wafer level | Byeoung-ju Ha, Seog-soon Baek, Hyun Cheol KIM, Yong-soo Oh | 2002-05-21 |