Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454472 | Semiconductor manufacturing apparatus for photolithographic process | Dong Ho Kim, Ki-Sung Cho | 2002-09-24 |
| 6357938 | Coating and developing process system | Hyoung Rae Noh, Ki-Whan Shim | 2002-03-19 |