Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387573 | Phase shift mask using CrAION as phase shifter material and manufacturing method thereof | Jo Hyun PARK, Kwang-soo No | 2002-05-14 |
EK
Eun-Ah Kim
Overall (2002): #222,177 of 266,432Top 85%
1
Patents 2002