Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383949 | Method of depositing an ozone-TEOS oxide film to eliminate its base material dependence, and apparatus for forming such a film at several different temperatures | Dong-geun Na | 2002-05-07 |
| 6372672 | Method of forming a silicon nitride layer in a semiconductor device | Ju-Bum Lee, Byung Keun Hwang | 2002-04-16 |
| 6336339 | Damper for refrigerators | Il-Uk Joung | 2002-01-08 |