Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465346 | Conducting line of semiconductor device and manufacturing method thereof using aluminum oxide layer as hard mask | Ji Soo Kim, Wan Jae Park, Sang-Hun Seo | 2002-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465346 | Conducting line of semiconductor device and manufacturing method thereof using aluminum oxide layer as hard mask | Ji Soo Kim, Wan Jae Park, Sang-Hun Seo | 2002-10-15 |