Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460552 | Method and apparatus for cleaning flat workpieces | — | 2002-10-08 |
| 6398846 | Semiconductor manufacturing system with getter safety device | Charles H. Applegarth | 2002-06-04 |