Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410912 | Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation | Lawrence A. Goodman | 2002-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410912 | Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation | Lawrence A. Goodman | 2002-06-25 |