Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6388632 | Slot antenna used for plasma surface processing apparatus | Kenji Tanaka, Takahiro Arakawa | 2002-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6388632 | Slot antenna used for plasma surface processing apparatus | Kenji Tanaka, Takahiro Arakawa | 2002-05-14 |