Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461717 | Aperture fill | Edward W. Rutter, Jr., Edward K. Pavelchek | 2002-10-08 |
| 6410209 | Methods utilizing antireflective coating compositions with exposure under 200 nm | Timothy G. Adams, Edward K. Pavelchek, Roger F. Sinta, Manuel DoCanto, Robert F. Blacksmith | 2002-06-25 |
| 6406828 | Polymer and photoresist compositions | Charles R. Szmanda, George G. Barclay, Wang Yueh | 2002-06-18 |
| 6379861 | Polymers and photoresist compositions comprising same | Gary N. Taylor, George G. Barclay | 2002-04-30 |