Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482567 | Oxime sulfonate and N-oxyimidosulfonate photoacid generators and photoresists comprising same | Gerhard Pohlers | 2002-11-19 |
| 6458506 | Photoacid generators and photoresists comprising same | — | 2002-10-01 |