Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464741 | CMP polishing slurry dewatering and reconstitution | — | 2002-10-15 |
| 6447375 | Polishing method using a reconstituted dry particulate polishing composition | Robert Rhoades | 2002-09-10 |
| 6428586 | Method of manufacturing a polymer or polymer/composite polishing pad | — | 2002-08-06 |
| 6413288 | CMP polishing slurry dewatering and reconstitution | — | 2002-07-02 |
| 6365520 | Small particle size chemical mechanical polishing composition | Robert Rhoades, Robert C. Roberts | 2002-04-02 |