Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480263 | Apparatus and method for phase shift photomasking | — | 2002-11-12 |
| 6466304 | Illumination device for projection system and method for fabricating | — | 2002-10-15 |
| 6395433 | Photomask for projection lithography at or below about 160 nm and a method thereof | — | 2002-05-28 |
| 6388736 | Imaging method using phase boundary masking with modified illumination | John S. Petersen | 2002-05-14 |
| 6368755 | Masks for use in optical lithography below 180 nm | — | 2002-04-09 |