Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436821 | Method for producing a micromechanical structure and a micromechanical structure | — | 2002-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436821 | Method for producing a micromechanical structure and a micromechanical structure | — | 2002-08-20 |