Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490993 | Rotating device for plasma immersion supported treatment of substrates | Ronald Neidhardt, Karl Kohlhof, Siegmar Schoser | 2002-12-10 |
| 6368717 | Combination antiabrasion layer | Johannes Rauschnabel, Johannes Voigt | 2002-04-09 |