Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462566 | Sensor element | Martin Schoefthaler, Ralf Schellin, Bernd Maihoefer, Markus Lutz, Harald Emmerich +1 more | 2002-10-08 |
| 6372656 | Method of producing a radiation sensor | Wilhelm Frey | 2002-04-16 |
| 6360604 | Acceleration sensor | Bernhard Elsner, Wilhelm Frey | 2002-03-26 |
| 6340644 | Method for applying a protecting lacquer on a wafer | Volker Becker, Andrea Schilp | 2002-01-22 |