Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6456377 | Method for measuring optical feature of exposure apparatus and exposure apparatus having means for measuring optical feature | Masayuki Murayama | 2002-09-24 |
| 6416913 | Scanning exposure method accounting for thermal transformation of mask | — | 2002-07-09 |
| 6406826 | Carrier for image developer for electrophotography | Satoshi Mochizuki, Yasuo Asahina, Tomomi Suzuki | 2002-06-18 |