Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498398 | Semiconductor device having through holes selectively through isolation material covering wirings that are relatively far apart | — | 2002-12-24 |
| 6483193 | Fabrication process for a semiconductor device with damascene interconnect lines of the same level separated by insulators with different dielectric constants | — | 2002-11-19 |
| 6479407 | Semiconductor device and process for producing the same | Takashi Yokoyama | 2002-11-12 |
| 6468898 | Method of manufacturing semiconductor device | — | 2002-10-22 |
| 6383927 | Process for fabricating semiconductor device, apparatus using more than one kind of inert gas for evacuating air and method for entering wafer into the apparatus | — | 2002-05-07 |
| 6358808 | Semiconductor element with thermally nitrided film on high resistance film and method of manufacturing the same | — | 2002-03-19 |
| 6340843 | Plasma CVD dielectric film and process for forming the same | — | 2002-01-22 |