Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410454 | Method and apparatus for removing contaminants from the surface of a semiconductor wafer | Cozy Ban, Akihiko OSAKI | 2002-06-25 |
| 6358329 | Resist residue removal apparatus and method | Itaru Kanno | 2002-03-19 |
| 6340253 | Resist peeling system and control method of a resist peeling solution | Hiroshi Tanaka, Yoshiyuki Hori | 2002-01-22 |