Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479320 | Vacuum package fabrication of microelectromechanical system devices with integrated circuit components | — | 2002-11-12 |
| 6392232 | High fill factor bolometer array | Mark Wadsworth | 2002-05-21 |