Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455326 | Enhanced process capability for sputtered ferroelectric films using low frequency pulsed DC and RF power supplies | — | 2002-09-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455326 | Enhanced process capability for sputtered ferroelectric films using low frequency pulsed DC and RF power supplies | — | 2002-09-24 |