Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439244 | Pedestal design for a sputter clean chamber to improve aluminum gap filling ability | — | 2002-08-27 |
| 6413384 | Method for maintaining the cleanness of a vacuum chamber of a physical vapor deposition system | — | 2002-07-02 |
| 6393210 | Rapid thermal processing method and apparatus | — | 2002-05-21 |
| 6360772 | Mass flow controller | — | 2002-03-26 |