Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440186 | Polishing composition and polishing method employing it | Kenji Sakai, Tadahiro Kitamura, Katsuyoshi Ina | 2002-08-27 |
| 6340390 | Method for manufacturing silicon single crystal | Yukio Sugimoto, Fusao Tabata | 2002-01-22 |