Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6381356 | Method and apparatus for inspecting high-precision patterns | Shingo Murakami, Yukio Ogura, Katsuhiko Nakatani, Yoshiaki Aida | 2002-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6381356 | Method and apparatus for inspecting high-precision patterns | Shingo Murakami, Yukio Ogura, Katsuhiko Nakatani, Yoshiaki Aida | 2002-04-30 |