Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432730 | Plasma processing method and apparatus | Takuya Matsui | 2002-08-13 |
| 6355573 | Plasma processing method and apparatus | Masaki Suzuki, Takuya Matsui | 2002-03-12 |
| 6346915 | Plasma processing method and apparatus | Takuya Matsui | 2002-02-12 |
| 6342139 | Sputtering system | Isamu Aokura, Naoki Suzuki | 2002-01-29 |