Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473563 | Vaporizer and apparatus for vaporizing and supplying | Yukichi Takamatsu, Takeo Yoneyama, Koji Kiriyama, Kazuaki Tonari, Mitsuhiro Iwata | 2002-10-29 |
| 6461407 | Method and apparatus for supplying liquid raw material | Yukichi Takamatsu, Takeo Yoneyama, Yoshiyasu Ishihama | 2002-10-08 |