Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6415193 | Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment | Manoj Betawar, Vrunda Bhagwat, Dinesh Goradia, Manish C. Mehta | 2002-07-02 |