SY

Shunji Yamada

SI Sumitomo Heavy Industries: 1 patents #13 of 42Top 35%
Overall (2002): #116,428 of 266,432Top 45%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6499533 Cooling disk unit for use in a wafer chucking device — 2002-12-31