Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368665 | Apparatus and process for controlled atmosphere chemical vapor deposition | Andrew Tye Hunt, Subramaniam Shanmugham, Henry Luten, Tzyy Jiuan Hwang, Girish Nilkanth Deshpande | 2002-04-09 |