Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468922 | Method for manufacturing a semiconductor device with a dual interlayer insulator film of borophosphosilicate glass to prevent diffusion of phosphorus | — | 2002-10-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468922 | Method for manufacturing a semiconductor device with a dual interlayer insulator film of borophosphosilicate glass to prevent diffusion of phosphorus | — | 2002-10-22 |