NI

Naokatsu Ikegami

OC Oki Electric Industry Co.: 3 patents #5 of 373Top 2%
Overall (2002): #23,684 of 266,432Top 9%
3
Patents 2002

Issued Patents 2002

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6500745 Method for manufacturing sidewall spacers of a semiconductor device with high etch selectivity and minimized shaving — 2002-12-31
6413438 Method of forming via hole by dry etching — 2002-07-02
6355572 Method of dry etching organic SOG film — 2002-03-12