Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440262 | Resist mask having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer | Satoshi Machida | 2002-08-27 |
| 6368980 | Resist mark having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer and method for manufacturing semiconductor wafer having it | Satoshi Machida | 2002-04-09 |