Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490026 | Method and system for aligning object to be processed with predetermined target article | Akira Watanabe | 2002-12-03 |
| 6455438 | Fabrication method for a semiconductor device | Azusa Yanagisawa, Koki Muto, Tadashi Nishimuro, Katsuo Oshima, Akira Watanabe +4 more | 2002-09-24 |