Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488824 | Sputtering apparatus and process for high rate coatings | Martin Philip Rosenblum, Carl T. Petersen | 2002-12-03 |
| 6365010 | Sputtering apparatus and process for high rate coatings | — | 2002-04-02 |