Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403501 | Method of controlling FSG deposition rate in an HDP reactor | Jonathan Hander, Julian J. Hsieh | 2002-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403501 | Method of controlling FSG deposition rate in an HDP reactor | Jonathan Hander, Julian J. Hsieh | 2002-06-11 |