Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448186 | Method and apparatus for use of hydrogen and silanes in plasma | Tirunelveli S. Ravi, Richard S. Swope, Jerrod P. Krebs | 2002-09-10 |
| 6376391 | Pulsed or tailored bias for filling gaps with low dielectric constant material | Tirunelveli S. Ravi | 2002-04-23 |