Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6431807 | Wafer processing architecture including single-wafer load lock with cooling unit | Tony Jakubiec | 2002-08-13 |
| 6405101 | Wafer centering system and method | William Johanson, Steve Kleinke, Damon Tyrone Genetti | 2002-06-11 |
| 6375746 | Wafer processing architecture including load locks | Tony Jakubiec | 2002-04-23 |